JPH0251258U - - Google Patents
Info
- Publication number
- JPH0251258U JPH0251258U JP12949588U JP12949588U JPH0251258U JP H0251258 U JPH0251258 U JP H0251258U JP 12949588 U JP12949588 U JP 12949588U JP 12949588 U JP12949588 U JP 12949588U JP H0251258 U JPH0251258 U JP H0251258U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- vacuum evaporation
- evaporation apparatus
- evaporated
- shutter device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12949588U JPH069007Y2 (ja) | 1988-09-30 | 1988-09-30 | 真空蒸着装置のシャッタ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12949588U JPH069007Y2 (ja) | 1988-09-30 | 1988-09-30 | 真空蒸着装置のシャッタ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0251258U true JPH0251258U (en]) | 1990-04-10 |
| JPH069007Y2 JPH069007Y2 (ja) | 1994-03-09 |
Family
ID=31383823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12949588U Expired - Lifetime JPH069007Y2 (ja) | 1988-09-30 | 1988-09-30 | 真空蒸着装置のシャッタ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069007Y2 (en]) |
-
1988
- 1988-09-30 JP JP12949588U patent/JPH069007Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069007Y2 (ja) | 1994-03-09 |
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